Template Synthesis of Monodisperse Submicrometer Spherical Nanoporous Silicon Particles

Monodisperse spherical nanoporous silicon ( np -Si) particles of submicrometer size are fabricated with mesoporous silica particles as a template. Silicon is synthesized within the mesopores of monodisperse silica particles by the thermal decomposition of monosilane. Then, the template material ( a...

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Veröffentlicht in:	Semiconductors (Woodbury, N.Y.) N.Y.), 2019-08, Vol.53 (8), p.1048-1053
Hauptverfasser:	Kurdyukov, D. A., Feoktistov, N. A., Kirilenko, D. A., Smirnov, A. N., Davydov, V. Yu, Golubev, V. G.
Format:	Artikel
Sprache:	eng
Schlagworte:	CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY ETCHING Low-Dimensional Systems Magnetic Materials Magnetism N-TYPE CONDUCTORS NANOSTRUCTURES Near infrared radiation P-TYPE CONDUCTORS PHOTOLUMINESCENCE Physics Physics and Astronomy PYROLYSIS Quantum Phenomena Semiconductor Structures Silane SILICON Silicon dioxide SILICON OXIDES SPECIFIC SURFACE AREA SPHERICAL CONFIGURATION SYNTHESIS Thermal decomposition
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Zusammenfassung:	Monodisperse spherical nanoporous silicon ( np -Si) particles of submicrometer size are fabricated with mesoporous silica particles as a template. Silicon is synthesized within the mesopores of monodisperse silica particles by the thermal decomposition of monosilane. Then, the template material ( a -SiO 2 ) is removed by wet etching. The particles obtained have a small root-mean-square size scatter (no more than 10%) and large specific surface area (250 m 2 g –1 ) and pore volume (0.5 cm 3 g –1 ). It is shown that np -Si particles exhibit photoluminescence in the visible and near-IR (infrared) spectral ranges.
ISSN:	1063-7826 1090-6479
DOI:	10.1134/S106378261908013X