Investigation of a Contamination Film Formed by the Electron Beam Irradiation

In the study of materials on electron probe devices in the field of action of the electron beam, a contaminating hydrocarbon film is formed, which affects the experimental results. In this paper, we have studied the influence of a contamination film on carbon-film-coated dielectrics on the intensity...

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Veröffentlicht in:	Technical physics 2019-09, Vol.64 (9), p.1336-1342
Hauptverfasser:	Orekhova, K. N., Serov, Yu. M., Dement’ev, P. A., Ivanova, E. V., Kravets, V. A., Usacheva, V. P., Zamoryanskaya, M. V.
Format:	Artikel
Sprache:	eng
Schlagworte:	ABSORPTION Absorptivity CARBON CATHODOLUMINESCENCE Classical and Continuum Physics CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY CONTAMINATION DIELECTRIC MATERIALS ELECTRON BEAMS Electron irradiation ELECTRON PROBES Electrons HYDROCARBONS Physics Physics and Astronomy Physics of Nanostructures SURFACE COATING THIN FILMS ULTRAVIOLET RADIATION X RADIATION
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Beschreibung
Zusammenfassung:	In the study of materials on electron probe devices in the field of action of the electron beam, a contaminating hydrocarbon film is formed, which affects the experimental results. In this paper, we have studied the influence of a contamination film on carbon-film-coated dielectrics on the intensity of cathodoluminescence and characteristic X-ray lines. The absorption coefficient of the contamination film in the visible and UV ranges has been determined. Filming mechanisms at different parameters of the electron beam have been discussed.
ISSN:	1063-7842 1090-6525
DOI:	10.1134/S1063784219090123