Influence of Cathode Structure and Configuration on Complex Nitride Coatings

Influence of Cathode Structure and Configuration on Complex Nitride Coatings

The production of complex (multielement) nitride coatings on the basis of different cathode structure and configuration is considered. The coatings obtained by means of one-piece and composite cathodes have different properties. This difference is smaller for multielement coatings.

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Veröffentlicht in:Russian engineering research 2017-12, Vol.37 (12), p.1048-1051
Hauptverfasser: Tabakov, V. P., Shirmanov, N. A., Sizov, S. V., Chikhranov, A. V.
Format: Artikel
Sprache:eng
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CATHODES
COATINGS
CONFIGURATION
Configurations
ENGINEERING
Engineering Design
MATERIALS SCIENCE
MECHANICAL PROPERTIES
NITRIDES
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container_end_page 1051
container_issue 12
container_start_page 1048
container_title Russian engineering research
container_volume 37
creator Tabakov, V. P.
Shirmanov, N. A.
Sizov, S. V.
Chikhranov, A. V.
description The production of complex (multielement) nitride coatings on the basis of different cathode structure and configuration is considered. The coatings obtained by means of one-piece and composite cathodes have different properties. This difference is smaller for multielement coatings.
doi_str_mv 10.3103/S1068798X17120176
format Article
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subjects CATHODES
COATINGS
CONFIGURATION
Configurations
ENGINEERING
Engineering Design
MATERIALS SCIENCE
MECHANICAL PROPERTIES
NITRIDES
title Influence of Cathode Structure and Configuration on Complex Nitride Coatings
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