Influence of Cathode Structure and Configuration on Complex Nitride Coatings

The production of complex (multielement) nitride coatings on the basis of different cathode structure and configuration is considered. The coatings obtained by means of one-piece and composite cathodes have different properties. This difference is smaller for multielement coatings.

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Veröffentlicht in:Russian engineering research 2017-12, Vol.37 (12), p.1048-1051
Hauptverfasser: Tabakov, V. P., Shirmanov, N. A., Sizov, S. V., Chikhranov, A. V.
Format: Artikel
Sprache:eng
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Zusammenfassung:The production of complex (multielement) nitride coatings on the basis of different cathode structure and configuration is considered. The coatings obtained by means of one-piece and composite cathodes have different properties. This difference is smaller for multielement coatings.
ISSN:1068-798X
1934-8088
DOI:10.3103/S1068798X17120176