Influence of Cathode Structure and Configuration on Complex Nitride Coatings
The production of complex (multielement) nitride coatings on the basis of different cathode structure and configuration is considered. The coatings obtained by means of one-piece and composite cathodes have different properties. This difference is smaller for multielement coatings.
Gespeichert in:
Veröffentlicht in: | Russian engineering research 2017-12, Vol.37 (12), p.1048-1051 |
---|---|
Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The production of complex (multielement) nitride coatings on the basis of different cathode structure and configuration is considered. The coatings obtained by means of one-piece and composite cathodes have different properties. This difference is smaller for multielement coatings. |
---|---|
ISSN: | 1068-798X 1934-8088 |
DOI: | 10.3103/S1068798X17120176 |