Modular Calculation of the Conductance of Complex Vacuum Systems with Free-Molecular Gas Flow
An algorithm is proposed for calculating the conductance of complex vacuum systems by the Monte Carlo method. The algorithm is based on a modular approach to the complex system.
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Veröffentlicht in: | Russian engineering research 2018-08, Vol.38 (8), p.579-580 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | An algorithm is proposed for calculating the conductance of complex vacuum systems by the Monte Carlo method. The algorithm is based on a modular approach to the complex system. |
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ISSN: | 1068-798X 1934-8088 |
DOI: | 10.3103/S1068798X18080063 |