Attempts to improve the H{sub 2}S sensitivity of TiO{sub 2} films
We report the pulsed laser deposited titanium oxide thin film for H{sub 2}S gas sensing. The surface and bulk electronic structure is revealed using XPS technique. These TiO{sub 2} films showed very good selectivity to H{sub 2}S with response of around ~ 60% at 200°C operating temperature. In order...
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Veröffentlicht in: | AIP conference proceedings 2016-05, Vol.1731 (1) |
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Hauptverfasser: | , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We report the pulsed laser deposited titanium oxide thin film for H{sub 2}S gas sensing. The surface and bulk electronic structure is revealed using XPS technique. These TiO{sub 2} films showed very good selectivity to H{sub 2}S with response of around ~ 60% at 200°C operating temperature. In order to improve the sensor response so as to realize the technological application, we hereby attempted bi-directional efforts as (i) Nb-doping and (ii) defects engineering in the TiO{sub 2} film. It is revealed that Nb-doping reduces response however defect engineering improves the same. |
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ISSN: | 0094-243X 1551-7616 |
DOI: | 10.1063/1.4947899 |