Test results of a counting type SOI device for a new x-ray area detector

Development of a new detector using Silicon-On-Insulator (SOI) technology has been started in the Photon Factory, KEK. The aim of this project is to develop a pulse-counting-type X-ray detector that can be used in synchrotron radiation experiments using soft X-rays. We started to make a Test Element Group of SOI chip, which is called CPIXPTEG1 and evaluated its performance. We succeeded in readout of output signals for 16 keV X-rays from the SOI chips. We also found that the middle-SOI structure was effective against a signal distortion caused by hole traps in the buried oxide layer.