Nanofilm thickness measurement by resonant frequencies

We report a theoretical investigation of monochromatic laser light - thin metal film interaction. The dependences of transmission, reflection and absorption coefficients of an electromagnetic wave on the incidence angle, layer thickness and effective electron collision frequency are obtained. The ab...

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Veröffentlicht in:Quantum electronics (Woodbury, N.Y.) N.Y.), 2015-01, Vol.45 (3), p.270-274
Hauptverfasser: Latyshev, A.V., Yushkanov, A.A.
Format: Artikel
Sprache:eng
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Zusammenfassung:We report a theoretical investigation of monochromatic laser light - thin metal film interaction. The dependences of transmission, reflection and absorption coefficients of an electromagnetic wave on the incidence angle, layer thickness and effective electron collision frequency are obtained. The above coefficients are analysed in the region of resonant frequencies. The resulting formula for the transmission, reflection and absorption coefficients are found to be valid for any angles of incidence. The case of mirror boundary conditions is considered. A formula is derived for contactless measurement of the film thickness by the observed resonant frequencies.
ISSN:1063-7818
1468-4799
DOI:10.1070/QE2015v045n03ABEH015379