Generation of picosecond UV pulses by an Nd{sup 3+}:YAG laser for amplification in an ArF amplifier
The scheme generating UV pulses with a duration 15 ps and output energy up to 11.5 mJ is implemented in the system consisting of a picosecond Nd{sup 3+}:YAG laser with multistage nonlinearoptical conversion of fundamental frequency radiation into radiation with a wavelength 193 nm followed by an exc...
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Veröffentlicht in: | Quantum electronics (Woodbury, N.Y.) N.Y.), 2015-03, Vol.45 (3) |
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Hauptverfasser: | , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | The scheme generating UV pulses with a duration 15 ps and output energy up to 11.5 mJ is implemented in the system consisting of a picosecond Nd{sup 3+}:YAG laser with multistage nonlinearoptical conversion of fundamental frequency radiation into radiation with a wavelength 193 nm followed by an excimer ArF amplifier. The temporal characteristics and the contrast of the amplified pulses are measured. (lasers) |
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ISSN: | 1063-7818 |
DOI: | 10.1070/QE2015V045N03ABEH015576 |