Fabrication of microchannels in fused silica using femtosecond Bessel beams

Extended birefringent waveguiding microchannels up to 15 mm long were created inside fused silica by single-pulse irradiation with femtosecond Bessel beams. The birefringent refractive index change of 2–4 × 10−4 is attributed to residual mechanical stress. The microchannels were chemically etched in KOH solution to produce 15 mm long microcapillaries with smooth walls and a high aspect ratio of 1:250. Bessel beams provide higher speed of material processing compared to conventional multipulse femtosecond laser micromachining techniques and permit simple control of the optical axis direction of the birefringent waveguides, which is important for practical applications [Corrielli et al., “Rotated waveplates in integrated waveguide optics,” Nat. Commun. 5, 4249 (2014)].