Compact RF ion source for industrial electrostatic ion accelerator

Korea Multi-purpose Accelerator Complex is developing a single-ended electrostatic ion accelerator to irradiate gaseous ions, such as hydrogen and nitrogen, on materials for industrial applications. ELV type high voltage power supply has been selected. Because of the limited space, electrical power,...

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Veröffentlicht in:Review of scientific instruments 2016-02, Vol.87 (2), p.02C105-02C105
Hauptverfasser: Kwon, Hyeok-Jung, Park, Sae-Hoon, Kim, Dae-Il, Cho, Yong-Sub
Format: Artikel
Sprache:eng
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Zusammenfassung:Korea Multi-purpose Accelerator Complex is developing a single-ended electrostatic ion accelerator to irradiate gaseous ions, such as hydrogen and nitrogen, on materials for industrial applications. ELV type high voltage power supply has been selected. Because of the limited space, electrical power, and robust operation, a 200 MHz RF ion source has been developed. In this paper, the accelerator system, test stand of the ion source, and its test results are described.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.4932318