Structural properties of ZnO:Al films produced by the sol–gel technique

ZnO:Al films are produced by sol–gel deposition at temperatures of 350–550°C, using different types of reagents. Atomic-force microscopy, X-ray diffraction analysis, Raman spectroscopy, and optical transmittance measurements are used to study the dependence of the structural, morphological, and opti...

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Veröffentlicht in:Semiconductors (Woodbury, N.Y.) N.Y.), 2015-10, Vol.49 (10), p.1253-1258
Hauptverfasser: Zaretskaya, E. P., Gremenok, V. F., Semchenko, A. V., Sidsky, V. V., Juskenas, R. L.
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Sprache:eng
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Zusammenfassung:ZnO:Al films are produced by sol–gel deposition at temperatures of 350–550°C, using different types of reagents. Atomic-force microscopy, X-ray diffraction analysis, Raman spectroscopy, and optical transmittance measurements are used to study the dependence of the structural, morphological, and optical properties of the ZnO:Al coatings on the conditions of deposition. The optical conditions for the production of ZnO:Al layers with preferred orientation in the [001] direction and distinguished by small surface roughness are established. The layers produced in the study possess optical transmittance at a level of up to 95% in a wide spectral range and can be used in optoelectronic devices.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782615100280