Highly conductive indium nanowires deposited on silicon by dip-pen nanolithography

In this paper, we developed a new dip-pen nanolithography (DPN) method. Using this method, we fabricated conductive nanowires with diameters of 30–50 nm on silicon substrates. To accomplish this, indium was transferred from an atomic force microscopy tip to the surface by applying a potential differ...

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Veröffentlicht in:Journal of applied physics 2015-04, Vol.117 (14)
Hauptverfasser: Kozhukhov, Anton, Klimenko, Anatoliy, Shcheglov, Dmitriy, Volodin, Vladimir, Karnaeva, Natalya, Latyshev, Alexander
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Sprache:eng
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Zusammenfassung:In this paper, we developed a new dip-pen nanolithography (DPN) method. Using this method, we fabricated conductive nanowires with diameters of 30–50 nm on silicon substrates. To accomplish this, indium was transferred from an atomic force microscopy tip to the surface by applying a potential difference between the tip and substrate. The fabricated indium nanowires were several micrometers in length. Unlike thermal DPN, our DPN method hardly oxidized the indium, producing nanowires with conductivities from 5.7 × 10−3 to 4 × 10−2 Ω cm.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.4917530