Understanding the early cycling evolution behaviors for phase change memory application

The RESET current of T-shaped phase change memory cells with 35 nm heating electrodes has been studied to understand the behavior of early cycling evolution. Results show that the RESET current has been significantly reduced after the early cycling evolution (1st RESET) operation. Compared the trans...

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Veröffentlicht in:Journal of applied physics 2014-11, Vol.116 (20)
Hauptverfasser: Wang, Yuchan, Chen, Yifeng, Cai, Daolin, Cheng, Yan, Chen, Xiaogang, Wang, Yueqing, Xia, Mengjiao, Zhou, Mi, Li, Gezi, Zhang, Yiyun, Gao, Dan, Song, Zhitang, Feng, Gaoming
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Sprache:eng
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Zusammenfassung:The RESET current of T-shaped phase change memory cells with 35 nm heating electrodes has been studied to understand the behavior of early cycling evolution. Results show that the RESET current has been significantly reduced after the early cycling evolution (1st RESET) operation. Compared the transmission electron microscope images, it is found that the hexagonal Ge2Sb2Te5 (GST) crystal grains are changed into the grains with face centered cubic structure after the early cycling evolution operation, which is taken as the major reason for the reduced RESET current, confirmed by a two-dimensional finite analysis and ab initio calculations.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.4902851