Note: O-ring stack system for electron gun alignment

We present a reliable method for aligning an electron gun which consists of an electron source and lenses by controlling a stack of rubber O-rings in a vacuum condition. The beam direction angle is precisely tilted along two axes by adjusting the height difference of a stack of O-rings. In addition,...

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Veröffentlicht in:Review of scientific instruments 2015-01, Vol.86 (1), p.016110-016110
Hauptverfasser: Park, In-Yong, Cho, Boklae, Han, Cheolsu, Shin, Seungmin, Lee, Dongjun, Ahn, Sang Jung
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Sprache:eng
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