Strain characterization of fin-shaped field effect transistors with SiGe stressors using nanobeam electron diffraction

This study undertook strain analysis on fin-shaped field effect transistor structures with epitaxial Si1−xGex stressors, using nano-beam electron diffraction and finite elements method. Combining the two methods disclosed dynamic strain distribution in the source/drain and channel region of the fin...

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Veröffentlicht in:Applied physics letters 2014-08, Vol.105 (8)
Hauptverfasser: Kim, Sun-Wook, Byeon, Dae-Seop, Jang, Hyunchul, Koo, Sang-Mo, Lee, Hoo-Jeong, Ko, Dae-Hong
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Sprache:eng
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Zusammenfassung:This study undertook strain analysis on fin-shaped field effect transistor structures with epitaxial Si1−xGex stressors, using nano-beam electron diffraction and finite elements method. Combining the two methods disclosed dynamic strain distribution in the source/drain and channel region of the fin structure, and the effects of dimensional factors such as the stressor thickness and fin width, offering valuable information for device design.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4893926