Indium tin oxide/InGaZnO bilayer stacks for enhanced mobility and optical stability in amorphous oxide thin film transistors
Optically more stable, high mobility InGaZnO thin film transistors were fabricated by implementing ultrathin In2O3-SnO2 (ITO) layers at the gate dielectric/semiconductor interface. The optimized device portrayed a high saturation mobility of ∼80 cm2/V s with off current values lower than 10−11A. The...
Gespeichert in:
Veröffentlicht in: | Applied physics letters 2014-07, Vol.105 (1) |
---|---|
Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Optically more stable, high mobility InGaZnO thin film transistors were fabricated by implementing ultrathin In2O3-SnO2 (ITO) layers at the gate dielectric/semiconductor interface. The optimized device portrayed a high saturation mobility of ∼80 cm2/V s with off current values lower than 10−11A. The ITO layer also acted as a hole filter layer, and hole current and threshold voltage shift values measured under negative bias illumination conditions showed that a significant amount of photo-generated charge carriers were annihilated before reaching the gate insulator. This effect was more evident at larger intensities, showing threshold voltage shift values reduced by more than ∼70% under stress conditions. |
---|---|
ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.4889856 |