Surface characterization of silica glass substrates treated by atomic hydrogen

Silica glass substrates with very flat surfaces were exposed to atomic hydrogen at different temperatures and durations. An atomic force microscope was used to measure root-mean-square (RMS) roughness and two-dimensional power spectral density (PSD). In the treatment with atomic hydrogen up to 900°C, there was no significant change in the surface. By the treatment at 1000°C, the changes in the RMS roughness and the PSD curves were observed. It was suggested that these changes were caused by etching due to reactions of atomic hydrogen with surface silica. By analysis based on the k-correlation model, it was found that the spatial frequency of the asperities became higher with an increase of the treatment time. Furthermore, the data showed that atomic hydrogen can flatten silica glass surfaces by controlling heat-treatment conditions. •Silica glass surface was treated by atomic hydrogen at various temperatures.•Surface roughness was measured by an atomic force microscope.•Roughness data were analyzed by two-dimensional power spectral density.•Atomic hydrogen can flatten silica glass surfaces.