The application of orthogonal photolithography to micro-scale organic field effect transistors and complementary inverters on flexible substrate

Micro-scale pentacene organic field effect transistors (OFETs) were fabricated on a flexible poly(ethylene terephthalate) (PET) substrate. By applying a highly fluorinated developing solvents and its compatible photoresist materials, it has become possible to make the micro-scale patterning for orga...

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Veröffentlicht in:Applied physics letters 2014-02, Vol.104 (5)
Hauptverfasser: Jang, Jingon, Song, Younggul, Oh, Hyuntaek, Yoo, Daekyoung, Kim, Dongku, Lee, Hyungwoo, Hong, Seunghun, Lee, Jin-Kyun, Lee, Takhee
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Sprache:eng
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Zusammenfassung:Micro-scale pentacene organic field effect transistors (OFETs) were fabricated on a flexible poly(ethylene terephthalate) (PET) substrate. By applying a highly fluorinated developing solvents and its compatible photoresist materials, it has become possible to make the micro-scale patterning for organic devices using standard photolithography without damaging the underlying polymer layers. The flexible pentacene OFETs with 3 μm-sized channel length exhibited stable electrical characteristics under bent configurations and under a large number of repetitive bending cycles. Furthermore, we demonstrated micro-scale organic complementary inverters on a flexible PET substrate using p-type pentacene and n-type copper hexadecafluorophthalocyanine materials.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4863678