Probing deeper by hard x-ray photoelectron spectroscopy

We report an hard x-ray photoelectron spectroscopy method combining high excitation energy (15 keV) and improved modelling of the core-level energy loss features. It provides depth distribution of deeply buried layers with very high sensitivity. We show that a conventional approach relying on intens...

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Veröffentlicht in:	Applied physics letters 2014-02, Vol.104 (5)
Hauptverfasser:	Risterucci, P., Renault, O., Martinez, E., Detlefs, B., Delaye, V., Zegenhagen, J., Gaumer, C., Grenet, G., Tougaard, S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics COMPUTERIZED SIMULATION CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY Core loss Electrons Energy dissipation ENERGY LOSSES Engineering Sciences EXCITATION HARD X RADIATION LANTHANUM LAYERS Materials Micro and nanotechnologies Microelectronics Optics PHOTOELECTRON SPECTROSCOPY Photonic PROBES SENSITIVITY SPATIAL DISTRIBUTION Spectrum analysis X ray photoelectron spectroscopy X ray spectra
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