Probing deeper by hard x-ray photoelectron spectroscopy

We report an hard x-ray photoelectron spectroscopy method combining high excitation energy (15 keV) and improved modelling of the core-level energy loss features. It provides depth distribution of deeply buried layers with very high sensitivity. We show that a conventional approach relying on intens...

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Veröffentlicht in:Applied physics letters 2014-02, Vol.104 (5)
Hauptverfasser: Risterucci, P., Renault, O., Martinez, E., Detlefs, B., Delaye, V., Zegenhagen, J., Gaumer, C., Grenet, G., Tougaard, S.
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Sprache:eng
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Zusammenfassung:We report an hard x-ray photoelectron spectroscopy method combining high excitation energy (15 keV) and improved modelling of the core-level energy loss features. It provides depth distribution of deeply buried layers with very high sensitivity. We show that a conventional approach relying on intensities of the core-level peaks is unreliable due to intense plasmon losses. We reliably determine the depth distribution of 1 ML La in a high-κ/metal gate stack capped with 50 nm a-Si. The method extends the sensitivity of photoelectron spectroscopy to depths beyond 50 nm.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4864488