The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas
In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics, a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently, the Secondary Electron Asymmetry Effect (SEAE) was...
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Veröffentlicht in: | Applied physics letters 2013-08, Vol.103 (6) |
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creator | Korolov, Ihor Derzsi, Aranka Donkó, Zoltán Schulze, Julian |
description | In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics, a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently, the Secondary Electron Asymmetry Effect (SEAE) was discovered (Lafleur et al., J. Phys. D: Appl. Phys. 46, 135201 (2013)): unequal secondary electron emission coefficients at both electrodes were found to induce an asymmetry in single-frequency capacitive plasmas. Here, we investigate the simultaneous presence of both effects, i.e., a dual-frequency plasma driven by two consecutive harmonics with different electrode materials. We find that the superposition of the EAE and the SEAE is generally non-linear, i.e., the asymmetries generated by each individual effect do not simply add up at all phases. The control ranges of the dc self-bias and the mean ion energy can be enlarged, if both effects are combined. |
doi_str_mv | 10.1063/1.4817920 |
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The control ranges of the dc self-bias and the mean ion energy can be enlarged, if both effects are combined.</description><subject>70 PLASMA PHYSICS AND FUSION TECHNOLOGY</subject><subject>ARGON</subject><subject>ASYMMETRY</subject><subject>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS</subject><subject>COLLISIONS</subject><subject>ELECTRODES</subject><subject>ELECTRON EMISSION</subject><subject>ELECTRONS</subject><subject>HARMONICS</subject><subject>HIGH-FREQUENCY DISCHARGES</subject><subject>NONLINEAR PROBLEMS</subject><subject>PHASE SHIFT</subject><subject>PLASMA</subject><subject>PLASMA SIMULATION</subject><subject>RADIOWAVE RADIATION</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><recordid>eNpNkE1LAzEQhoMoWKsH_8GCJw9bM8l-HqX4BQUv9RySyYSu7BebrVDwxzulPXjK5J1nXmZeIe5BrkAW-glWWQVlreSFWIAsy1QDVJdiIaXUaVHncC1uYvzmb660Xojf7Y6Spg_tnnqkZAjJzEIkHHpvp0NCLeE8DT0zfo_kExsPXUczt1g8sieiQdv-61EIrPJQgna02MzND7WHBIf92LLJ2NrY2XgrroJtI92d36X4en3Zrt_Tzefbx_p5k6Kq1ZyiBe1RKWkJXF7kmffOBgIMisuCUGc-03Xuc-fqvLIu1KVylZMBIGNML8XDyXeIc2Mir0O44wt73tEopaBic6YeTxROQ4wTBTNOTcchGJDmGK4Bcw5X_wFq3G84</recordid><startdate>20130805</startdate><enddate>20130805</enddate><creator>Korolov, Ihor</creator><creator>Derzsi, Aranka</creator><creator>Donkó, Zoltán</creator><creator>Schulze, Julian</creator><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>20130805</creationdate><title>The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas</title><author>Korolov, Ihor ; Derzsi, Aranka ; Donkó, Zoltán ; Schulze, Julian</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c292t-ca13dc220ae1b5654ddbafe1cf24dd6ec34d4395d5bb958abf972b8b0f114e1c3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>70 PLASMA PHYSICS AND FUSION TECHNOLOGY</topic><topic>ARGON</topic><topic>ASYMMETRY</topic><topic>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS</topic><topic>COLLISIONS</topic><topic>ELECTRODES</topic><topic>ELECTRON EMISSION</topic><topic>ELECTRONS</topic><topic>HARMONICS</topic><topic>HIGH-FREQUENCY DISCHARGES</topic><topic>NONLINEAR PROBLEMS</topic><topic>PHASE SHIFT</topic><topic>PLASMA</topic><topic>PLASMA SIMULATION</topic><topic>RADIOWAVE RADIATION</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Korolov, Ihor</creatorcontrib><creatorcontrib>Derzsi, Aranka</creatorcontrib><creatorcontrib>Donkó, Zoltán</creatorcontrib><creatorcontrib>Schulze, Julian</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Korolov, Ihor</au><au>Derzsi, Aranka</au><au>Donkó, Zoltán</au><au>Schulze, Julian</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas</atitle><jtitle>Applied physics letters</jtitle><date>2013-08-05</date><risdate>2013</risdate><volume>103</volume><issue>6</issue><issn>0003-6951</issn><eissn>1077-3118</eissn><abstract>In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics, a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). 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source | American Institute of Physics (AIP) Journals; AIP_美国物理联合会期刊回溯(NSTL购买); Alma/SFX Local Collection |
subjects | 70 PLASMA PHYSICS AND FUSION TECHNOLOGY ARGON ASYMMETRY CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS COLLISIONS ELECTRODES ELECTRON EMISSION ELECTRONS HARMONICS HIGH-FREQUENCY DISCHARGES NONLINEAR PROBLEMS PHASE SHIFT PLASMA PLASMA SIMULATION RADIOWAVE RADIATION |
title | The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas |
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