The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas

In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics, a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently, the Secondary Electron Asymmetry Effect (SEAE) was...

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Veröffentlicht in:Applied physics letters 2013-08, Vol.103 (6)
Hauptverfasser: Korolov, Ihor, Derzsi, Aranka, Donkó, Zoltán, Schulze, Julian
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Donkó, Zoltán
Schulze, Julian
description In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics, a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently, the Secondary Electron Asymmetry Effect (SEAE) was discovered (Lafleur et al., J. Phys. D: Appl. Phys. 46, 135201 (2013)): unequal secondary electron emission coefficients at both electrodes were found to induce an asymmetry in single-frequency capacitive plasmas. Here, we investigate the simultaneous presence of both effects, i.e., a dual-frequency plasma driven by two consecutive harmonics with different electrode materials. We find that the superposition of the EAE and the SEAE is generally non-linear, i.e., the asymmetries generated by each individual effect do not simply add up at all phases. The control ranges of the dc self-bias and the mean ion energy can be enlarged, if both effects are combined.
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source American Institute of Physics (AIP) Journals; AIP_美国物理联合会期刊回溯(NSTL购买); Alma/SFX Local Collection
subjects 70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
ASYMMETRY
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
COLLISIONS
ELECTRODES
ELECTRON EMISSION
ELECTRONS
HARMONICS
HIGH-FREQUENCY DISCHARGES
NONLINEAR PROBLEMS
PHASE SHIFT
PLASMA
PLASMA SIMULATION
RADIOWAVE RADIATION
title The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas
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