The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas
In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics, a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently, the Secondary Electron Asymmetry Effect (SEAE) was...
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Veröffentlicht in: | Applied physics letters 2013-08, Vol.103 (6) |
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Sprache: | eng |
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Zusammenfassung: | In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics, a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently, the Secondary Electron Asymmetry Effect (SEAE) was discovered (Lafleur et al., J. Phys. D: Appl. Phys. 46, 135201 (2013)): unequal secondary electron emission coefficients at both electrodes were found to induce an asymmetry in single-frequency capacitive plasmas. Here, we investigate the simultaneous presence of both effects, i.e., a dual-frequency plasma driven by two consecutive harmonics with different electrode materials. We find that the superposition of the EAE and the SEAE is generally non-linear, i.e., the asymmetries generated by each individual effect do not simply add up at all phases. The control ranges of the dc self-bias and the mean ion energy can be enlarged, if both effects are combined. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.4817920 |