A high-speed photoresist removal process using multibubble microwave plasma under a mixture of multiphase plasma environment

This paper proposes a photoresist removal process that uses multibubble microwave plasma produced in ultrapure water. A non-implanted photoresist and various kinds of ion-implanted photoresists such as B, P, and As were treated with a high ion dose of 5 × 1015 atoms/cm2 at an acceleration energy of...

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Veröffentlicht in:Applied physics letters 2013-09, Vol.103 (14)
Hauptverfasser: Ishijima, Tatsuo, Nosaka, Kohei, Tanaka, Yasunori, Uesugi, Yoshihiko, Goto, Yousuke, Horibe, Hideo
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Sprache:eng
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Zusammenfassung:This paper proposes a photoresist removal process that uses multibubble microwave plasma produced in ultrapure water. A non-implanted photoresist and various kinds of ion-implanted photoresists such as B, P, and As were treated with a high ion dose of 5 × 1015 atoms/cm2 at an acceleration energy of 70 keV; this resulted in fast removal rates of more than 1 μm/min. When the distance between multibubble microwave plasma and the photoresist film was increased by a few millimeters, the photoresist removal rates drastically decreased; this suggests that short-lived radicals such as OH affect high-speed photoresist removal.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4823530