Effect of near atmospheric pressure nitrogen plasma treatment on Pt/ZnO interface

The effect of near atmospheric pressure nitrogen plasma (NAP) treatment of platinum (Pt)/zinc oxide (ZnO) interface was investigated. NAP can nitride the ZnO surface at even room temperature. Hard x-ray photoelectron spectroscopy revealed that NAP treatment reduced the surface electron accumulation at the ZnO surface and inhibited the Zn diffusion into the Pt electrode, which are critical issues affecting the Schottky barrier height and the ideality factor of the Pt/ZnO structure. After NAP treatment, the Pt Schottky contact indicated an improvement of electrical properties. NAP treatment is effective for the surface passivation and the Schottky contact formation of ZnO.