Model for the description of ion beam extraction from electron cyclotron resonance ion sources

The finite difference method trajectory code KOBRA3-INP has been developed now for 25 years to perform the simulation of ion beam extraction in three dimensions. Meanwhile, the code has been validated for different applications: high current ion beam extraction from plasma sources for ion implantati...

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Veröffentlicht in:Review of scientific instruments 2010-02, Vol.81 (2), p.02B725-02B725-3
1. Verfasser: Spaedtke, P.
Format: Artikel
Sprache:eng
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Zusammenfassung:The finite difference method trajectory code KOBRA3-INP has been developed now for 25 years to perform the simulation of ion beam extraction in three dimensions. Meanwhile, the code has been validated for different applications: high current ion beam extraction from plasma sources for ion implantation technology, neutral gas heating in fusion devices, or ion thrusters for space propulsion. One major issue of the development of this code was to improve the flexibility of the applied model for the simulation of different types of particle sources. Fixed emitter sources might be simulated with that code as well as laser ion sources, Penning ion sources, electron cyclotron resonance ion sources (ECRISs), or H − sources, which require the simulation of negative ions, negative electrons, and positive charges simultaneously. The model which has been developed for ECRIS has now been used to explore the conditions for the ion beam extraction from a still nonexisting ion source, a so called ARC-ECRIS [ P. Suominen and F. Wenander , Rev. Sci. Instrum. 79 , 02A305 ( 2008 ) ]. It has to be shown whether the plasma generator has similar properties like regular ECRIS. However, the emittance of the extracted beam seems to be much better compared to an ECRIS equipped with a hexapole.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.3318157