Computational technique for plasma parameters determination using Langmuir probe data

In the present work, we consider a new numerical method for processing the experimental information on the electron energy distribution function obtained with a Langmuir probe in a low-pressure plasma. This method offers the possibility to establish the temperature and concentration of the electrons for different forms of the distribution function. Some specific difficulties of the previous methods used to do such estimations are surpassed using the method proposed in this work.