Features of electron mobility in a thin silicon layer in an insulator-silicon-insulator structure

Electron mobility in a thin silicon layer of a metal-insulator-semiconductor-insulator-metal system is studied as a function of longitudinal and transverse electric fields (in wide ranges of their values), temperature in the range 1.7 to 400 K, and changes in γ-ray irradiation conditions. It is show...

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Veröffentlicht in:Semiconductors (Woodbury, N.Y.) N.Y.), 2012-04, Vol.46 (4), p.478-483
Hauptverfasser: Leonov, A. V., Mokrushin, A. D., Omeljanovskaja, N. M.
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Sprache:eng
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Zusammenfassung:Electron mobility in a thin silicon layer of a metal-insulator-semiconductor-insulator-metal system is studied as a function of longitudinal and transverse electric fields (in wide ranges of their values), temperature in the range 1.7 to 400 K, and changes in γ-ray irradiation conditions. It is shown that, in the temperature range 400 to ∼100 K, electron mobility increases in accordance with the mechanism of electron scattering at an acoustic phonon, while, with a subsequent decrease in temperature to the temperature of liquid helium, mobility drops because the Coulomb scattering of electrons at charged surface centers starts to dominate. It is demonstrated that as a result of γ-ray irradiation, electron mobility decreases and the degree of this decrease strongly depends on the electrical mode of the sensor during irradiation.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782612040148