In situ investigation of the early stage of TiO{sub 2} epitaxy on (001) SrTiO{sub 3}

We report on a systematic study of the growth of epitaxial TiO{sub 2} films deposited by pulsed laser deposition on Ti-terminated SrTiO{sub 3} (001) single crystals. By using in situ reflection high energy electron diffraction, low energy electron diffraction, x-ray photoemission spectroscopy, and scanning probe microscopy, we show that the stabilization of the anatase (001) phase is preceded by the growth of a few nanometers thick pseudomorphic Sr{sub x}TiO{sub 2+y} (x, y < 1) intermediate layer. The data demonstrate that the formation of this intermediate phase is related to the activation of a long range Sr migration from the SrTiO{sub 3} substrate into the film. Our results enrich the phase diagram of the Sr-Ti-O system under epitaxial strain opening a route for the study of the electronic and dielectric properties of the reported Sr-deficient SrTiO{sub 3} phase.