Orbital motion of dust particles in an rf magnetron discharge. Ion drag force or neutral atom wind force
Microparticles with sizes up to 130 μm have been confined and the velocity and diameter of particles in a plasma trap of an rf magnetron discharge with an arc magnetic field have been simultaneously measured. The motion of the gas induced by electron and ion cyclotron currents has been numerically s...
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Veröffentlicht in: | Journal of experimental and theoretical physics 2012-03, Vol.114 (3), p.535-546 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Microparticles with sizes up to 130 μm have been confined and the velocity and diameter of particles in a plasma trap of an rf magnetron discharge with an arc magnetic field have been simultaneously measured. The motion of the gas induced by electron and ion cyclotron currents has been numerically simulated using the Navier-Stokes equation. The experimental and numerical results confirm the mechanism of the orbital motion of dust particles in the magnetron discharge plasma that is associated with the orbital motion of the neutral gas accelerated by electron and ion drift flows in crossed electric and magnetic fields. |
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ISSN: | 1063-7761 1090-6509 |
DOI: | 10.1134/S1063776112020276 |