Probing buried layers by photoelectron spectromicroscopy with hard x-ray excitation
We report about a proof-of-principle experiment which explores the perspectives of performing hard x-ray photoemission spectromicroscopy with high lateral resolution. Our results obtained with an energy-filtered photoemission microscope at the PETRA III storage ring facility using hard x-ray excitat...
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Veröffentlicht in: | Applied physics letters 2012-05, Vol.100 (22), p.223106-223106-3 |
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Hauptverfasser: | , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | We report about a proof-of-principle experiment which explores the perspectives of performing hard x-ray photoemission spectromicroscopy with high lateral resolution. Our results obtained with an energy-filtered photoemission microscope at the PETRA III storage ring facility using hard x-ray excitation up to 6.5keV photon energy demonstrate that it is possible to obtain selected-area x-ray photoemission spectra from regions less than 500nm in diameter. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.4722940 |