Probing buried layers by photoelectron spectromicroscopy with hard x-ray excitation

We report about a proof-of-principle experiment which explores the perspectives of performing hard x-ray photoemission spectromicroscopy with high lateral resolution. Our results obtained with an energy-filtered photoemission microscope at the PETRA III storage ring facility using hard x-ray excitat...

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Veröffentlicht in:Applied physics letters 2012-05, Vol.100 (22), p.223106-223106-3
Hauptverfasser: Wiemann, C., Patt, M., Cramm, S., Escher, M., Merkel, M., Gloskovskii, A., Thiess, S., Drube, W., Schneider, C. M.
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Sprache:eng
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Zusammenfassung:We report about a proof-of-principle experiment which explores the perspectives of performing hard x-ray photoemission spectromicroscopy with high lateral resolution. Our results obtained with an energy-filtered photoemission microscope at the PETRA III storage ring facility using hard x-ray excitation up to 6.5keV photon energy demonstrate that it is possible to obtain selected-area x-ray photoemission spectra from regions less than 500nm in diameter.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4722940