Deep Level Transient Spectroscopy Technique to Analyze Radiation Induced Defects in Power Transistors
Deep Level Transient Spectroscopy (DLTS) technique is useful tool to study process and radiation induced defects in semiconductor materials and devices. The different types of radiation induced trap levels in the collector-base depletion region of the transistors were studied by DLTS technique.
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Tagungsbericht |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Deep Level Transient Spectroscopy (DLTS) technique is useful tool to study process and radiation induced defects in semiconductor materials and devices. The different types of radiation induced trap levels in the collector-base depletion region of the transistors were studied by DLTS technique. |
---|---|
ISSN: | 0094-243X 1551-7616 |
DOI: | 10.1063/1.3606235 |