Effect of different chemical treatments of surface on the height of Al-p-SiGe and Au-n-SiGe barriers

Effect of different chemical treatments of surface on the height of Al-p-SiGe and Au-n-SiGe barriers

The effect of different chemical treatments on the properties of Au- n -SiGe and Al- p -SiGe Schottky barriers has been investigated. Etching under different conditions was used to prepare surfaces with different densities of surface states ( D ss ). It is shown that the barrier height in the struct...

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Veröffentlicht in:Semiconductors (Woodbury, N.Y.) N.Y.), 2010-05, Vol.44 (5), p.605-609
Hauptverfasser: Atabaev, I. G., Matchanov, N. A., Hajiev, M. U., Pak, V., Saliev, T. M.
Format: Artikel
Sprache:eng
Schlagworte:
ALLOYS
ALUMINIUM
DENSITY
ELEMENTS
Epitaxy
ETCHING
GERMANIUM
GERMANIUM COMPOUNDS
GERMANIUM SILICIDES
GOLD
Interfaces
Magnetic Materials
Magnetism
MATERIALS SCIENCE
METALS
PHYSICAL PROPERTIES
Physics
Physics and Astronomy
Semiconductor Structures
SILICIDES
SILICON COMPOUNDS
SURFACE FINISHING
SURFACES
TRANSITION ELEMENTS
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Zusammenfassung:The effect of different chemical treatments on the properties of Au- n -SiGe and Al- p -SiGe Schottky barriers has been investigated. Etching under different conditions was used to prepare surfaces with different densities of surface states ( D ss ). It is shown that the barrier height in the structures under study correlates with the D ss value and germanium content in the Si 1 − x Ge x alloy.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782610050106