Optimization Of A Mass Spectrometry Process

Optimization Of A Mass Spectrometry Process

In this paper we present and discuss a system developed in order to optimize the mass spectrometry process of an ion implanter. The system uses a PC to control and display the mass spectrum. The operator interacts with the I/O board, that interfaces with the computer and the ion implanter by a LabVI...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Lopes, Jose, Instituto Superior Tecnico, Av. Rovisco Pais, 1, 1049-001 Lisbon, Instituto Tecnologico e Nuclear, E.N. 10, Sacavem 2686-953, Centro de Fisica Nuclear da Universidade de Lisboa, Av. Prof. Gama Pinto 2, 1649-003 Lisboa, Alegria, F. Correa, Instituto de Telecomunicacoes, Av. Rovisco Pais, 1, 1049-001 Lisbon, Redondo, Luis, Barradas, N. P., Alves, E., Rocha, Jorge
Format: Tagungsbericht
Sprache:eng
Schlagworte:
BEAMS
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
INTERFACES
ION IMPLANTATION
ISOTOPES
MASS SPECTRA
MASS SPECTROSCOPY
OPTIMIZATION
PARTICLE BEAMS
SPECTRA
SPECTROSCOPY
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:In this paper we present and discuss a system developed in order to optimize the mass spectrometry process of an ion implanter. The system uses a PC to control and display the mass spectrum. The operator interacts with the I/O board, that interfaces with the computer and the ion implanter by a LabVIEW code. Experimental results are shown and the capabilities of the system are discussed.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.3586058