A Double Scattering Analytical Model For Elastic Recoil Detection Analysis

We present an analytical model for calculation of double scattering in elastic recoil detection measurements. Only events involving the beam particle and the recoil are considered, i.e. 1) an ion scatters off a target element and then produces a recoil, and 2) an ion produces a recoil which then sca...

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Hauptverfasser: Barradas, N P, Lorenz, K, Darakchieva, V, Alves, E
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:We present an analytical model for calculation of double scattering in elastic recoil detection measurements. Only events involving the beam particle and the recoil are considered, i.e. 1) an ion scatters off a target element and then produces a recoil, and 2) an ion produces a recoil which then scatters off a target element. Events involving intermediate recoils are not considered, i.e. when the primary ion produces a recoil which then produces a second recoil. If the recoil element is also present in the stopping foil, recoil events in the stopping foil are also calculated. We included the model in the standard code for IBA data analysis NDF, and applied it to the measurement of hydrogen in Si.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.3586111