Development of a Compact Ion Source with a Hot Hollow Cathode

Development of a Compact Ion Source with a Hot Hollow Cathode

A compact ion source with 14 mm diameter, 30 mm long discharge region was developed. A total size of the ion source including the beam extraction system was 60 mm in diameter and 160 mm in length. A high temperature coaxial cathode consisting of thin-wall tantalum and tungsten tubes produced a disch...

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Bibliographische Detailangaben
Hauptverfasser: Miyamoto, N, Demura, Y, Imakita, S, Kasuya, T, Vasquez, M R, Wada, M
Format: Tagungsbericht
Sprache:eng
Schlagworte:
BEAM CURRENTS
BEAM EXTRACTION
BEAMS
Beams (radiation)
CATHODES
CHARGED PARTICLES
CURRENTS
Discharge
ELECTRIC DISCHARGES
ELECTRODES
ELEMENTS
EXTRACTION
HEATING
HOLLOW CATHODES
HYDROGEN IONS
ION BEAMS
ION IMPLANTATION
ION SOURCES
IONS
METALS
PARTICLE ACCELERATORS
PLASMA
PLASMA HEATING
PLASMA PRODUCTION
REFRACTORY METALS
SEPARATION PROCESSES
TANTALUM
TRANSITION ELEMENTS
TUBES
TUNGSTEN
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Beschreibung
Zusammenfassung:A compact ion source with 14 mm diameter, 30 mm long discharge region was developed. A total size of the ion source including the beam extraction system was 60 mm in diameter and 160 mm in length. A high temperature coaxial cathode consisting of thin-wall tantalum and tungsten tubes produced a discharge plasma. A source gas was supplied through the inner W tube of the coaxial cathode. A stable plasma of H2 was maintained with the discharge current of 2.0 A at 68 A cathode heating current. The optimum H2 gas pressure for ion beam extraction was 210-2 Pa. Hydrogen ion beam current was 120 mu A (1 mA/cm2) at 2.0 A discharge current and 3.0 kV extraction voltage.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.3548446