Determination of the parameters of a microscopic object from a complex response of a differential microscope

Determination of the parameters of a microscopic object from a complex response of a differential microscope

An analysis of the amplitude and phase of a complex response of a heterodyne differential microscope was used to demonstrate experimentally the feasibility of determination of the parameters of a composite microscopic object representing a combination of a step with a groove. (laser applications and...

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Veröffentlicht in:Quantum electronics (Woodbury, N.Y.) N.Y.), 1998-09, Vol.28 (9), p.817-820
Hauptverfasser: Baranov, D V, Egorov, Alexander A, Zolotov, Evgenii M, Svidzinsky, K K
Format: Artikel
Sprache:eng
Schlagworte:
AMPLITUDES
INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
LASERS
MICROSCOPES
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Beschreibung
Zusammenfassung:An analysis of the amplitude and phase of a complex response of a heterodyne differential microscope was used to demonstrate experimentally the feasibility of determination of the parameters of a composite microscopic object representing a combination of a step with a groove. (laser applications and other topics in quantum electronics)
ISSN:1063-7818
1468-4799
DOI:10.1070/QE1998v028n09ABEH001334