Model based atomic resolution tomography

Electron tomography is a valuable three-dimensional characterization method, but the technique has so far been limited to a nanometer scale resolution, and therefore complementary two-dimensional structural analysis is generally performed using other techniques. In this paper, computer simulations of the latest transmission electron microscope technologies are performed on a CeO 2 supercell to investigate the extension of electron tomography to the atomic scale resolution, from a tilt series of high resolution electron microscopy (HREM) images. We showed that high-voltage and aberration-corrected microscopes were both capable of retrieving adjacent oxygen and Ce atoms for a thickness up to 2.5 nm. In the case where only a few tilt angle projections are in zone-axis orientations, we introduced a hybrid tomography method, whereby a lattice-resolved tomogram obtained from a few zone-axis projections is combined with the external shape reconstruction of the crystal from binary projections. Finally, we discussed some experimental challenges related to the proposed HREM tomography technique.