Longitudinal bulk acoustic mass sensor

Longitudinal bulk acoustic mass sensor

A polycrystalline silicon longitudinal bulk acoustic cantilever is fabricated and operated in air at 51 MHz. A mass sensitivity of 100 Hz/fg ( 1   fg = 10 − 15   g ) is obtained from the preliminary experiments where a minute mass is deposited on the device by means of focused ion beam. The total no...

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Veröffentlicht in:Applied physics letters 2009-07, Vol.95 (3), p.033506-033506-3
Hauptverfasser: Hales, J. H., Teva, J., Boisen, A., Davis, Z. J.
Format: Artikel
Sprache:eng
Schlagworte:
AIR
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
ION BEAMS
NOISE
POLYCRYSTALS
SEMICONDUCTOR MATERIALS
SENSORS
SILICON
SOUND WAVES
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Zusammenfassung:A polycrystalline silicon longitudinal bulk acoustic cantilever is fabricated and operated in air at 51 MHz. A mass sensitivity of 100 Hz/fg ( 1   fg = 10 − 15   g ) is obtained from the preliminary experiments where a minute mass is deposited on the device by means of focused ion beam. The total noise in the currently applied measurement system allows for a minimum detectable mass of 0.5 fg in air.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3168519