Effect of the arsenic cracking zone temperature on the efficiency of arsenic incorporation in CdHgTe films in molecular-beam epitaxy

Cd x Hg 1 − x Te films with x ≈ 0.22 and thickness of ∼10 µm have been grown by molecular-beam epitaxy on gallium arsenide substrates and doped in situ with arsenic. Activation annealing of doped films provided p -type conduction with a hole density of up to 10 17 cm −3 . The influence exerted by th...

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Veröffentlicht in:Semiconductors (Woodbury, N.Y.) N.Y.), 2008-06, Vol.42 (6), p.651-654
Hauptverfasser: Sidorov, G. Yu, Mikhaĭlov, N. N., Varavin, V. S., Ikusov, D. G., Sidorov, Yu. G., Dvoretskiĭ, S. A.
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Sprache:eng
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Zusammenfassung:Cd x Hg 1 − x Te films with x ≈ 0.22 and thickness of ∼10 µm have been grown by molecular-beam epitaxy on gallium arsenide substrates and doped in situ with arsenic. Activation annealing of doped films provided p -type conduction with a hole density of up to 10 17 cm −3 . The influence exerted by the arsenic cracking zone temperature on the efficiency of arsenic incorporation into the CdHgTe film was studied. A model describing the dependence of the arsenic concentration in the films on the arsenic cracking zone temperature was suggested. A comparison of the model and the experimental data demonstrated that the incorporation efficiency of diatomic arsenic is approximately two orders of magnitude higher than that of tetratomic arsenic.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782608060043