Effect of the arsenic cracking zone temperature on the efficiency of arsenic incorporation in CdHgTe films in molecular-beam epitaxy
Cd x Hg 1 − x Te films with x ≈ 0.22 and thickness of ∼10 µm have been grown by molecular-beam epitaxy on gallium arsenide substrates and doped in situ with arsenic. Activation annealing of doped films provided p -type conduction with a hole density of up to 10 17 cm −3 . The influence exerted by th...
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Veröffentlicht in: | Semiconductors (Woodbury, N.Y.) N.Y.), 2008-06, Vol.42 (6), p.651-654 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Cd
x
Hg
1 −
x
Te films with
x
≈ 0.22 and thickness of ∼10 µm have been grown by molecular-beam epitaxy on gallium arsenide substrates and doped in situ with arsenic. Activation annealing of doped films provided
p
-type conduction with a hole density of up to 10
17
cm
−3
. The influence exerted by the arsenic cracking zone temperature on the efficiency of arsenic incorporation into the CdHgTe film was studied. A model describing the dependence of the arsenic concentration in the films on the arsenic cracking zone temperature was suggested. A comparison of the model and the experimental data demonstrated that the incorporation efficiency of diatomic arsenic is approximately two orders of magnitude higher than that of tetratomic arsenic. |
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ISSN: | 1063-7826 1090-6479 |
DOI: | 10.1134/S1063782608060043 |