Plasma Chemical Aspects Of Dust Formation In Hydrocarbon Plasmas

This contribution deals with some plasma chemical aspects of dust formation in hydrocarbon plasmas. The interplay between dust formation and plasma chemistry will be discussed by means of different experimental results. One specific example concerns the formation of benzene and the role of atomic hy...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Berndt, J, Stepanovic, O, Kovacevic, E, Stefanovic, I, Winter, J
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	70 PLASMA PHYSICS AND FUSION TECHNOLOGY BENZENE DUSTS ELECTRIC DISCHARGES HYDROGEN Physics PLASMA PLASMA CONFINEMENT PLASMA DENSITY Plasma Physics POLYMERIZATION RF SYSTEMS
Online-Zugang:	Volltext
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