Plasma Chemical Aspects Of Dust Formation In Hydrocarbon Plasmas

This contribution deals with some plasma chemical aspects of dust formation in hydrocarbon plasmas. The interplay between dust formation and plasma chemistry will be discussed by means of different experimental results. One specific example concerns the formation of benzene and the role of atomic hy...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	Berndt, J, Stepanovic, O, Kovacevic, E, Stefanovic, I, Winter, J
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	70 PLASMA PHYSICS AND FUSION TECHNOLOGY BENZENE DUSTS ELECTRIC DISCHARGES HYDROGEN Physics PLASMA PLASMA CONFINEMENT PLASMA DENSITY Plasma Physics POLYMERIZATION RF SYSTEMS
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	This contribution deals with some plasma chemical aspects of dust formation in hydrocarbon plasmas. The interplay between dust formation and plasma chemistry will be discussed by means of different experimental results. One specific example concerns the formation of benzene and the role of atomic hydrogen for plasma chemical processes and dust formation in hydrocarbon discharges.
ISSN:	0094-243X 1551-7616
DOI:	10.1063/1.2997089