Optical Investigations of Dust Particles Distribution in RF and DC Discharges

Optical emission spectroscopy is used to study dust particles movement and conditions of a formation of ordered plasma-dust structures in a capacitively coupled RF discharge. 3D binocular diagnostics of plasma-dust structures in dc discharge was made.

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Bibliographische Detailangaben
Hauptverfasser: Ramazanov, T S, Dosbolayev, M K, Jumabekov, A N, Amangaliyeva, R Zh, Filatova, I I, Azharonok, V V
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:Optical emission spectroscopy is used to study dust particles movement and conditions of a formation of ordered plasma-dust structures in a capacitively coupled RF discharge. 3D binocular diagnostics of plasma-dust structures in dc discharge was made.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.2996837