Optical Investigations of Dust Particles Distribution in RF and DC Discharges
Optical emission spectroscopy is used to study dust particles movement and conditions of a formation of ordered plasma-dust structures in a capacitively coupled RF discharge. 3D binocular diagnostics of plasma-dust structures in dc discharge was made.
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Hauptverfasser: | , , , , , |
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | Optical emission spectroscopy is used to study dust particles movement and conditions of a formation of ordered plasma-dust structures in a capacitively coupled RF discharge. 3D binocular diagnostics of plasma-dust structures in dc discharge was made. |
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ISSN: | 0094-243X 1551-7616 |
DOI: | 10.1063/1.2996837 |