Large-scale patterning of indium tin oxide electrodes for guided mode extraction from organic light-emitting diodes

We describe a cost-efficient and large area scalable production process of organic light-emitting diodes (OLEDs) with photonic crystals (PCs) as extraction elements for guided modes. Using laser interference lithography and physical plasma etching, we texture the indium tin oxide (ITO) electrode lay...

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Veröffentlicht in:Journal of applied physics 2008-11, Vol.104 (9), p.093111-093111-5
Hauptverfasser: Geyer, Ulf, Hauss, Julian, Riedel, Boris, Gleiss, Sebastian, Lemmer, Uli, Gerken, Martina
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container_end_page 093111-5
container_issue 9
container_start_page 093111
container_title Journal of applied physics
container_volume 104
creator Geyer, Ulf
Hauss, Julian
Riedel, Boris
Gleiss, Sebastian
Lemmer, Uli
Gerken, Martina
description We describe a cost-efficient and large area scalable production process of organic light-emitting diodes (OLEDs) with photonic crystals (PCs) as extraction elements for guided modes. Using laser interference lithography and physical plasma etching, we texture the indium tin oxide (ITO) electrode layer of an OLED with one- and two-dimensional PC gratings. By optical transmission measurements, the resonant mode of the grating is shown to have a drift of only 0.4% over the 5 mm length of the ITO grating. By changing the lattice constant between 300 and 600 nm , the OLED emission angle of enhanced light outcoupling is tailored from − 24.25 ° to 37°. At these angles, the TE emission is enhanced up to a factor of 2.14.
doi_str_mv 10.1063/1.3014034
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fullrecord <record><control><sourceid>scitation_osti_</sourceid><recordid>TN_cdi_osti_scitechconnect_21185886</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>jap</sourcerecordid><originalsourceid>FETCH-LOGICAL-c312t-2763089b422a9d247641b205ff902fc673a706b67da7d4a263201a0a9b682ed53</originalsourceid><addsrcrecordid>eNp1kE1LAzEQhoMoWKsH_0HAk4etk2Q3u3sRpPgFBS96Dtl8bCPdpCQp1H_vbluPngZmnnnhfRC6JbAgwNkDWTAgJbDyDM0ING1RVxWcoxkAJUXT1u0lukrpG4CQhrUzlFYy9qZISm4M3sqcTfTO9zhY7Lx2uwFn53HYO22w2RiVY9AmYRsi7nfjUuMhTKd9jlJlFzy2MQw4xF56p_DG9etcmMHlPKVqN31fowsrN8ncnOYcfb08fy7fitXH6_vyaVUoRmguaM3Z2KArKZWtpmXNS9JRqKxtgVrFayZr4B2vtax1KSlnFIgE2Xa8oUZXbI7ujrkhZSeSctmotQrejzUEHQVUTcNH6v5IqRhSisaKbXSDjD-CgJicCiJOTkf28chOYXKq-z98ECsOYsWfWPYL_PZ-1Q</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Large-scale patterning of indium tin oxide electrodes for guided mode extraction from organic light-emitting diodes</title><source>AIP Journals Complete</source><source>AIP Digital Archive</source><source>Alma/SFX Local Collection</source><creator>Geyer, Ulf ; Hauss, Julian ; Riedel, Boris ; Gleiss, Sebastian ; Lemmer, Uli ; Gerken, Martina</creator><creatorcontrib>Geyer, Ulf ; Hauss, Julian ; Riedel, Boris ; Gleiss, Sebastian ; Lemmer, Uli ; Gerken, Martina</creatorcontrib><description>We describe a cost-efficient and large area scalable production process of organic light-emitting diodes (OLEDs) with photonic crystals (PCs) as extraction elements for guided modes. Using laser interference lithography and physical plasma etching, we texture the indium tin oxide (ITO) electrode layer of an OLED with one- and two-dimensional PC gratings. By optical transmission measurements, the resonant mode of the grating is shown to have a drift of only 0.4% over the 5 mm length of the ITO grating. By changing the lattice constant between 300 and 600 nm , the OLED emission angle of enhanced light outcoupling is tailored from − 24.25 ° to 37°. At these angles, the TE emission is enhanced up to a factor of 2.14.</description><identifier>ISSN: 0021-8979</identifier><identifier>EISSN: 1089-7550</identifier><identifier>DOI: 10.1063/1.3014034</identifier><identifier>CODEN: JAPIAU</identifier><language>eng</language><publisher>United States: American Institute of Physics</publisher><subject>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ; CRYSTALS ; ELECTRODES ; ETCHING ; INDIUM COMPOUNDS ; INTERFERENCE ; LASERS ; LATTICE PARAMETERS ; LAYERS ; LIGHT EMITTING DIODES ; LIGHT TRANSMISSION ; PLASMA ; SPUTTERING ; TEXTURE ; TIN OXIDES ; TWO-DIMENSIONAL CALCULATIONS ; VISIBLE RADIATION</subject><ispartof>Journal of applied physics, 2008-11, Vol.104 (9), p.093111-093111-5</ispartof><rights>2008 American Institute of Physics</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c312t-2763089b422a9d247641b205ff902fc673a706b67da7d4a263201a0a9b682ed53</citedby><cites>FETCH-LOGICAL-c312t-2763089b422a9d247641b205ff902fc673a706b67da7d4a263201a0a9b682ed53</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/jap/article-lookup/doi/10.1063/1.3014034$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>230,314,776,780,790,881,1553,4498,27901,27902,76126,76132</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/21185886$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Geyer, Ulf</creatorcontrib><creatorcontrib>Hauss, Julian</creatorcontrib><creatorcontrib>Riedel, Boris</creatorcontrib><creatorcontrib>Gleiss, Sebastian</creatorcontrib><creatorcontrib>Lemmer, Uli</creatorcontrib><creatorcontrib>Gerken, Martina</creatorcontrib><title>Large-scale patterning of indium tin oxide electrodes for guided mode extraction from organic light-emitting diodes</title><title>Journal of applied physics</title><description>We describe a cost-efficient and large area scalable production process of organic light-emitting diodes (OLEDs) with photonic crystals (PCs) as extraction elements for guided modes. Using laser interference lithography and physical plasma etching, we texture the indium tin oxide (ITO) electrode layer of an OLED with one- and two-dimensional PC gratings. By optical transmission measurements, the resonant mode of the grating is shown to have a drift of only 0.4% over the 5 mm length of the ITO grating. By changing the lattice constant between 300 and 600 nm , the OLED emission angle of enhanced light outcoupling is tailored from − 24.25 ° to 37°. At these angles, the TE emission is enhanced up to a factor of 2.14.</description><subject>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS</subject><subject>CRYSTALS</subject><subject>ELECTRODES</subject><subject>ETCHING</subject><subject>INDIUM COMPOUNDS</subject><subject>INTERFERENCE</subject><subject>LASERS</subject><subject>LATTICE PARAMETERS</subject><subject>LAYERS</subject><subject>LIGHT EMITTING DIODES</subject><subject>LIGHT TRANSMISSION</subject><subject>PLASMA</subject><subject>SPUTTERING</subject><subject>TEXTURE</subject><subject>TIN OXIDES</subject><subject>TWO-DIMENSIONAL CALCULATIONS</subject><subject>VISIBLE RADIATION</subject><issn>0021-8979</issn><issn>1089-7550</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2008</creationdate><recordtype>article</recordtype><recordid>eNp1kE1LAzEQhoMoWKsH_0HAk4etk2Q3u3sRpPgFBS96Dtl8bCPdpCQp1H_vbluPngZmnnnhfRC6JbAgwNkDWTAgJbDyDM0ING1RVxWcoxkAJUXT1u0lukrpG4CQhrUzlFYy9qZISm4M3sqcTfTO9zhY7Lx2uwFn53HYO22w2RiVY9AmYRsi7nfjUuMhTKd9jlJlFzy2MQw4xF56p_DG9etcmMHlPKVqN31fowsrN8ncnOYcfb08fy7fitXH6_vyaVUoRmguaM3Z2KArKZWtpmXNS9JRqKxtgVrFayZr4B2vtax1KSlnFIgE2Xa8oUZXbI7ujrkhZSeSctmotQrejzUEHQVUTcNH6v5IqRhSisaKbXSDjD-CgJicCiJOTkf28chOYXKq-z98ECsOYsWfWPYL_PZ-1Q</recordid><startdate>20081101</startdate><enddate>20081101</enddate><creator>Geyer, Ulf</creator><creator>Hauss, Julian</creator><creator>Riedel, Boris</creator><creator>Gleiss, Sebastian</creator><creator>Lemmer, Uli</creator><creator>Gerken, Martina</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>20081101</creationdate><title>Large-scale patterning of indium tin oxide electrodes for guided mode extraction from organic light-emitting diodes</title><author>Geyer, Ulf ; Hauss, Julian ; Riedel, Boris ; Gleiss, Sebastian ; Lemmer, Uli ; Gerken, Martina</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c312t-2763089b422a9d247641b205ff902fc673a706b67da7d4a263201a0a9b682ed53</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2008</creationdate><topic>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS</topic><topic>CRYSTALS</topic><topic>ELECTRODES</topic><topic>ETCHING</topic><topic>INDIUM COMPOUNDS</topic><topic>INTERFERENCE</topic><topic>LASERS</topic><topic>LATTICE PARAMETERS</topic><topic>LAYERS</topic><topic>LIGHT EMITTING DIODES</topic><topic>LIGHT TRANSMISSION</topic><topic>PLASMA</topic><topic>SPUTTERING</topic><topic>TEXTURE</topic><topic>TIN OXIDES</topic><topic>TWO-DIMENSIONAL CALCULATIONS</topic><topic>VISIBLE RADIATION</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Geyer, Ulf</creatorcontrib><creatorcontrib>Hauss, Julian</creatorcontrib><creatorcontrib>Riedel, Boris</creatorcontrib><creatorcontrib>Gleiss, Sebastian</creatorcontrib><creatorcontrib>Lemmer, Uli</creatorcontrib><creatorcontrib>Gerken, Martina</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Journal of applied physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Geyer, Ulf</au><au>Hauss, Julian</au><au>Riedel, Boris</au><au>Gleiss, Sebastian</au><au>Lemmer, Uli</au><au>Gerken, Martina</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Large-scale patterning of indium tin oxide electrodes for guided mode extraction from organic light-emitting diodes</atitle><jtitle>Journal of applied physics</jtitle><date>2008-11-01</date><risdate>2008</risdate><volume>104</volume><issue>9</issue><spage>093111</spage><epage>093111-5</epage><pages>093111-093111-5</pages><issn>0021-8979</issn><eissn>1089-7550</eissn><coden>JAPIAU</coden><abstract>We describe a cost-efficient and large area scalable production process of organic light-emitting diodes (OLEDs) with photonic crystals (PCs) as extraction elements for guided modes. Using laser interference lithography and physical plasma etching, we texture the indium tin oxide (ITO) electrode layer of an OLED with one- and two-dimensional PC gratings. By optical transmission measurements, the resonant mode of the grating is shown to have a drift of only 0.4% over the 5 mm length of the ITO grating. By changing the lattice constant between 300 and 600 nm , the OLED emission angle of enhanced light outcoupling is tailored from − 24.25 ° to 37°. At these angles, the TE emission is enhanced up to a factor of 2.14.</abstract><cop>United States</cop><pub>American Institute of Physics</pub><doi>10.1063/1.3014034</doi></addata></record>
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source AIP Journals Complete; AIP Digital Archive; Alma/SFX Local Collection
subjects CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
CRYSTALS
ELECTRODES
ETCHING
INDIUM COMPOUNDS
INTERFERENCE
LASERS
LATTICE PARAMETERS
LAYERS
LIGHT EMITTING DIODES
LIGHT TRANSMISSION
PLASMA
SPUTTERING
TEXTURE
TIN OXIDES
TWO-DIMENSIONAL CALCULATIONS
VISIBLE RADIATION
title Large-scale patterning of indium tin oxide electrodes for guided mode extraction from organic light-emitting diodes
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-07T13%3A45%3A26IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-scitation_osti_&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Large-scale%20patterning%20of%20indium%20tin%20oxide%20electrodes%20for%20guided%20mode%20extraction%20from%20organic%20light-emitting%20diodes&rft.jtitle=Journal%20of%20applied%20physics&rft.au=Geyer,%20Ulf&rft.date=2008-11-01&rft.volume=104&rft.issue=9&rft.spage=093111&rft.epage=093111-5&rft.pages=093111-093111-5&rft.issn=0021-8979&rft.eissn=1089-7550&rft.coden=JAPIAU&rft_id=info:doi/10.1063/1.3014034&rft_dat=%3Cscitation_osti_%3Ejap%3C/scitation_osti_%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true