Large-scale patterning of indium tin oxide electrodes for guided mode extraction from organic light-emitting diodes

We describe a cost-efficient and large area scalable production process of organic light-emitting diodes (OLEDs) with photonic crystals (PCs) as extraction elements for guided modes. Using laser interference lithography and physical plasma etching, we texture the indium tin oxide (ITO) electrode layer of an OLED with one- and two-dimensional PC gratings. By optical transmission measurements, the resonant mode of the grating is shown to have a drift of only 0.4% over the 5 mm length of the ITO grating. By changing the lattice constant between 300 and 600 nm , the OLED emission angle of enhanced light outcoupling is tailored from − 24.25 ° to 37°. At these angles, the TE emission is enhanced up to a factor of 2.14.