Influence of the Particle Formation and Behavior on the Electrical Parameters in Low Pressure Radio-Frequency CH{sub 4}/N{sub 2} Discharges

The particle formation in low pressure radio-frequency (13.56 MHz) CH{sub 4}/N{sub 2} discharges results from the gas decomposition and from the sputtering of the powered electrode. The particle formation and behavior are strongly modified with the nitrogen amount increase in the mixture. The observation of the particles in the CH{sub 4}/N{sub 2} mixture containing 70% of N{sub 2} reveals a particular particle behavior. The particle behavior is correlated with the electrical parameters of the discharge.