Status of ITEP decaborane ion source program

The joint research and development program is continued to develop steady-state ion source of decaborane beam for ion implantation industry. Both Freeman and Bernas ion sources for decaborane ion beam generation were investigated. Decaborane negative ion beam as well as positive ion beam were genera...

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Veröffentlicht in:	Review of scientific instruments 2008-02, Vol.79 (2), p.02C501-02C501-4
Hauptverfasser:	Kulevoy, T. V., Petrenko, S. V., Kuibeda, R. P., Seleznev, D. N., Koshelev, V. A., Kozlov, A. V., Stasevich, Yu B., Sitnikov, A. L., Shamailov, I. M., Pershin, V. I., Hershcovitch, A., Johnson, B. M., Gushenets, V. I., Oks, E. M., Poole, H. P., Masunov, E. S., Polozov, S. M.
Format:	Artikel
Sprache:	eng
Schlagworte:	ANIONS CATIONS CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS INDUSTRY ION BEAMS ION IMPLANTATION ION SOURCES ISOTOPE SEPARATION MASS STEADY-STATE CONDITIONS
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Beschreibung
Zusammenfassung:	The joint research and development program is continued to develop steady-state ion source of decaborane beam for ion implantation industry. Both Freeman and Bernas ion sources for decaborane ion beam generation were investigated. Decaborane negative ion beam as well as positive ion beam were generated and delivered to the output of mass separator. Experimental results obtained in ITEP are presented.
ISSN:	0034-6748 1089-7623
DOI:	10.1063/1.2802608