Hard-x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution

Substantial improvements in the nanofabrication and characteristics of gold Fresnel zone plates yielded unprecedented resolution levels in hard-x-ray microscopy. Tests performed on a variety of specimens with 8 - 10 keV photons demonstrated a first-order lateral resolution below 40 nm based on the R...

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Veröffentlicht in:Applied physics letters 2008-03, Vol.92 (10), p.103119-103119-3
Hauptverfasser: Chu, Y. S., Yi, J. M., De Carlo, F., Shen, Q., Lee, Wah-Keat, Wu, H. J., Wang, C. L., Wang, J. Y., Liu, C. J., Wang, C. H., Wu, S. R., Chien, C. C., Hwu, Y., Tkachuk, A., Yun, W., Feser, M., Liang, K. S., Yang, C. S., Je, J. H., Margaritondo, G.
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Sprache:eng
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Zusammenfassung:Substantial improvements in the nanofabrication and characteristics of gold Fresnel zone plates yielded unprecedented resolution levels in hard-x-ray microscopy. Tests performed on a variety of specimens with 8 - 10 keV photons demonstrated a first-order lateral resolution below 40 nm based on the Rayleigh criterion. Combined with the use of a phase contrast technique, this makes it possible to view features in the 30 nm range; good-quality images can be obtained at video rate, down to 50 ms ∕ frame . The important repercussions on materials science, nanotechnology, and the life sciences are discussed.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2857476