Resonance microwave volume plasma source

A conceptual design of a microwave gas-discharge plasma source is described. The possibility is considered of creating conditions under which microwave energy in the plasma resonance region would be efficiently converted into the energy of thermal and accelerated (fast) electrons. Results are presented from interferometric and probe measurements of the plasma density in a coaxial microwave plasmatron, as well as the data from probe measurements of the plasma potential and electron temperature. The dynamics of plasma radiation was recorded using a streak camera and a collimated photomultiplier. The experimental results indicate that, at relatively low pressures of the working gas, the nonlinear interaction between the microwave field and the inhomogeneous plasma in the resonance region of the plasmatron substantially affects the parameters of the ionized gas in the reactor volume.