EUV and soft X-ray transition radiation from MIRRORCLE-type tabletop synchrotrons

EUV and soft X-ray transition radiation from MIRRORCLE-type tabletop synchrotrons

MIRRORCLE-20SX tabletop synchrotron is under development for EUV lithography. We measured the soft X ray power from the existing synchrotron MIRRORCLE-6X (6MeV machine). Transition radiation power from one thin foil target was detected by a plastic scintillator, which is calibrated by using conventi...

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Bibliographische Detailangaben
Hauptverfasser: Toyosugi, Norio, Minkov, Dorian, Yamada, Hironari
Format: Tagungsbericht
Sprache:eng
Schlagworte:
FOILS
INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
LIGHT SOURCES
MASKING
PLASTIC SCINTILLATORS
PORTABLE SOURCES
SOFT X RADIATION
SYNCHROTRON RADIATION
SYNCHROTRON RADIATION SOURCES
SYNCHROTRONS
TRANSITION RADIATION
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Zusammenfassung:MIRRORCLE-20SX tabletop synchrotron is under development for EUV lithography. We measured the soft X ray power from the existing synchrotron MIRRORCLE-6X (6MeV machine). Transition radiation power from one thin foil target was detected by a plastic scintillator, which is calibrated by using conventional synchrotron radiation source at AIST. The output EUV power was 2.6 mW. From the experimental result of MIRRORCLE-6X we can extrapolate the EUV power for the 20MeV machine as large as one watt per foil. We expect 100 watt EUV by 100 of foils.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.2723639